Continuous-wave laser annealing of Si-rich oxide: A microscopic picture of macroscopic Si-SiO2 phase separation
We report on the first observation of the macroscopic (long-range) phase separation in Si-rich oxide SiOx(x<2) obtained by continuous-wave laser annealing of free-standing SiOx films. The effect is analyzed by a unique combination of microscopic methods (Raman, transmission, photoluminescence, and infrared spectroscopy, transmission electron microscopy, electron energy loss spectroscopy, and x-ray
