Comparison of UV-curable materials for high-resolution polymer nanoimprint stamps
We present a systematic comparison of four resins for nanoimprint intermediate polymer stamps, the standard IPS material, OrmoStamp and two new polymers GMN-PS90 (foil) and GMN-PS40 (liquid). The new polymers are based on acrylated silane and offer sufficiently high Young’s modulus and low shrinkage to provide good me chanical stability during the imprint process of well-separated structures. No
