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L1_0-ordered thin-film FePd was measured using AFM, MFM, TEM, XRR and GISAXS to determine what defects were present and how they affected the X-ray scattering. In AFM it was found that there was a terrace structure, with surface steps going along the <110>-direction. These steps originated in dislocations moving from the Pd-FePd interface to the surface, which could be seen in the TEM. The layer t
