Preparation and characterization of Ti-Zr-V non-evaporable getter films to be used in Ultra-high acuum
An appealing procedure to obtain operating pressures in the 10-8 Pa range, which is necessary for the insertion devices elements of synchrotron sources, is to coat the inner ultra-high vacuum chamber walls with a thin film of non-evaporable getter (NEG) metals. Titanium, zirconium, vanadium, and their alloys are used as NEG materials due to their low activation temperature, high chemical activity,
