Evolution of the below-bandgap anisotropic refractive indices and dielectric functions of β-(AlxGa1− x)2O3 (0 < x < 0.25) determined by generalized spectroscopic ellipsometry
We determine the composition dependence of the below-bandgap anisotropic refractive indices and dielectric functions of β-(AlxGa1−x )2O3 for x up to 25% Al. We use Mueller matrix generalized spectroscopic ellipsometry and investigate a set of high quality single crystalline bulk (x = 0 %, 5 %, 10 %, 15 %, 20 %, 25 %) and thin film (4.6%, 9.7%, 12%, 15%, 16.3%, 21%) samples grown by the Czochralski
