Low noise polymeric nanomechanical biosensor
A sensor device based on a single polymer cantilever and optical readout has been developed for detection of molecular recognition reactions without the need of a reference cantilever for subtraction of unspecific signals. Microcantilevers have been fabricated in the photoresist SU-8 with one surface passivated with a thin fluorocarbon layer. The SU-8 surface is sensitized with biological receptor